US Patent 7247544 High Q inductor integration

Patent 7247544 was granted and assigned to National Semiconductor on July, 2007 by the United States Patent and Trademark Office.

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Date of Patent

July 24, 2007

Patent Application Number

10121242

Date Filed

April 12, 2002

Patent Primary Examiner

Patent abstract

In an inductor integration process, a high Q inductor is achieved by forming an AlCu inductor via prior to depositing the inductor dielectric.

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