Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hideyoshi Tsuruta0
Nobuyuki Kondou0
Date of Patent
July 24, 2007
0Patent Application Number
111490800
Date Filed
June 9, 2005
0Patent Primary Examiner
Patent abstract
A substrate heating apparatus includes a ceramic base having a concave heating surface on which a substrate is placed, and a resistance heating element buried in the ceramic base. The central part of the concave heating surface defines the lowest point of the heating surface and the peripheral part of the concave heating surface defines the highest point of the heating surface.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
