US Patent 7247819 Substrate heating apparatus
Patent 7247819 was granted and assigned to NGK Insulators on July, 2007 by the United States Patent and Trademark Office.
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Patent abstract
A substrate heating apparatus is provided, including a base group including a plurality of bases, which are arranged substantially into a plate with a gap interposed between the bases, and which form a substrate mounting surface. A resistance heating element provided for at least one of the bases.
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US Patent 07247819 Substrate heating apparatus US Patent 7247819 Substrate heating apparatus
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Patent Number
0724781900
Patent Number
724781900
Edits on 3 Apr, 2023
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
072478190
Date of Patent
July 24, 2007
0Patent Application Number
111598200
Date Filed
June 23, 2005
0Official Website
Patent Primary Examiner
Edits on 27 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
072478190
Date of Patent
July 24, 2007
0Patent Application Number
111598200
Date Filed
June 23, 2005
0Official Website
Patent Primary Examiner
Edits on 15 Jun, 2022
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US Patent 07247819 Substrate heating apparatus
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07247819
Date of patent
July 24, 2007
Patent application number
11159820
Date Filed
June 23, 2005
Patent primary examiner
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