Patent attributes
In an electroluminescence element, a layered structure is employed for an upper electrode including a first upper conductive layer formed through evaporation, a buffer layer, and a second upper conductive layer formed through sputtering. By interposing the buffer layer between the first and second upper conductive layers, damages to a light emitting element layer formed below the upper electrode and containing an organic material or the like having a low resisting characteristic against sputtering environment can be prevented while a high level of a charge injection efficiency to the light emitting element layer is maintained for charges such as electrons and holes, and, at the same time, a conductive layer can be formed with superior coverage and uniformity, to a sufficient thickness, and with superior productivity. The buffer layer may have a multi-layer structure.