Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 31, 2007
Patent Application Number
11402947
Date Filed
April 13, 2006
Patent Primary Examiner
Patent abstract
A photomask has a semi-light-shielding portion having a light-shielding property and a light-transmitting portion surrounded by the semi-light-shielding portion, and a peripheral portion positioned in the periphery of the light-transmitting portion. The semi-light-shielding portion and the light-transmitting portion transmit exposure light in the same phase, whereas the peripheral portion transmits exposure light in a phase opposite to that of the light-transmitting portion.
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