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US Patent 7250842 MEMS inductor with very low resistance

Patent 7250842 was granted and assigned to National Semiconductor on July, 2007 by the United States Patent and Trademark Office.

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Patent abstract

A very, very low resistance micro-electromechanical system (MEMS) inductor, which provides resistance in the single-digit milliohm range, is formed by utilizing a single thick wide loop of metal formed around a magnetic core structure. The magnetic core structure, in turn, can utilize a laminated Ni—Fe structure that has an easy axis and a hard axis.

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