Is a
Patent attributes
Current Assignee
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Henry A. Hill0
Date of Patent
July 31, 2007
0Patent Application Number
110906570
Date Filed
March 25, 2005
0Patent Primary Examiner
Patent abstract
Spatial filtering of beams in interferometry systems is used to reduce a displacement of the beams from an optical path corresponding to the path of the beams in an optimally-aligned system. By reducing beam displacement from the optical path, the system reduces the magnitude of beam shears and associated non-cyclic errors in linear and angular displacements measured by the interferometry systems.
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