US Patent 7254900 Wafer edge wheel with drying function
Patent 7254900 was granted and assigned to Lam Research on August, 2007 by the United States Patent and Trademark Office.
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Patent abstract
An edge wheel for supporting and rotating a disk-shaped substrate includes a wheel body having a peripheral groove configured to support an edge of a substrate and at least one radial channel extending into said wheel body from said peripheral groove. An edge wheel dryer and a method for processing a disk-shaped substrate are also described.
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US Patent 07254900 Wafer edge wheel with drying function US Patent 7254900 Wafer edge wheel with drying function
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Patent Number
0725490000
Patent Number
725490000
Edits on 18 May, 2023
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
072549000
Date of Patent
August 14, 2007
0Patent Application Number
113958930
Date Filed
March 31, 2006
0Official Website
Patent Primary Examiner
Edits on 26 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
072549000
Date of Patent
August 14, 2007
0Patent Application Number
113958930
Date Filed
March 31, 2006
0Official Website
Patent Primary Examiner
Edits on 16 Jun, 2022
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Edits on 22 Nov, 2021
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US Patent 07254900 Wafer edge wheel with drying function
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07254900
Date of patent
August 14, 2007
Patent application number
11395893
Date Filed
March 31, 2006
Patent primary examiner
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