Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
August 14, 2007
Patent Application Number
10413102
Date Filed
April 14, 2003
Patent Citations Received
Patent Primary Examiner
Patent abstract
A mechanism for mapping the contents of a cassette which is used for delivering substrates to a system for processing semiconductor and similar materials which is independent of load port or loading robot movement. The mapping mechanism includes a U-shaped probe having a photo emitter/receptor mounted on opposing surfaces of its legs. The U-shaped probe is mounted on a carriage for rotation about its longitudinal axis. The carriage is, in turn, mounted on a track for movement over the height of the cassette. The mapping mechanism is mounted on the loading port frame of the processing system adjacent to the load port and is moved into and out of it sensing position by interaction with a cam.
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