Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Stephen J. Benner0
Date of Patent
August 21, 2007
0Patent Application Number
108197540
Date Filed
April 7, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A method and apparatus for conditioning polishing pads that utilize an apertured conditioning disk for introducing operation-specific slurries, without the need for additional tooling, platens, and materials handling. The method and apparatus utilize a vacuum capability to pull waste material out of the conditioning pad and through the apertured conditioning disk to evacuate the apparatus through an outlet port, the apparatus may also include self-contained flushing means and a piezo-electric device for vibrating the pad conditioning apparatus.
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