Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 28, 2007
Patent Application Number
10684294
Date Filed
October 10, 2003
Patent Primary Examiner
Patent abstract
An optical element and a manufacturing method therefor, an exposure apparatus, and a device manufacturing method that can reduce the effect of intrinsic birefringence under high NA conditions. According to an optical element as one aspect of the present invention, an angle between a [0 0 1] axis of an isometric crystal and an optical axis is less than 10°, and preferably 0°.
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