US Patent 7264536 Polishing pad with window
Patent 7264536 was granted and assigned to Applied Materials on September, 2007 by the United States Patent and Trademark Office.
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Patent Inventor Names
Andreas Norbert Wiswesser0
David Datong Huo0
Dominic J. Benvegnu0
Jay Rohde0
Kerry F. Hughes0
Ramiel Oshana0
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Patent abstract
A polishing layer of a polishing has a window member with a top surface positioned a predetermined distance below the polishing surface. A transparent layer can be positioned below the polishing layer and supporting the window member.
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Patent Citations Received
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Official Website
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US Patent 07264536 Polishing pad with window US Patent 7264536 Polishing pad with window
Infobox
Patent Number
072645360
Patent Number
72645360
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
072645360
Date of Patent
September 4, 2007
0Patent Application Number
106695440
Date Filed
September 23, 2003
0Official Website
Patent Primary Examiner
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US Patent 07264536 Polishing pad with window
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07264536
Date of patent
September 4, 2007
Patent application number
10669544
Date Filed
September 23, 2003
Patent primary examiner
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