Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Abaneshwar Prasad0
Date of Patent
September 4, 2007
0Patent Application Number
107055330
Date Filed
November 10, 2003
0Patent Citations Received
...
Patent Primary Examiner
Patent abstract
The invention is directed to a polishing pad for use in chemical-mechanical polishing comprising a biodegradable polymer. The biodegradable polymer comprises a repeat unit selected from the group consisting of glycolic acid, lactic acid, hydroxyalkanoic acids, hydroxybutyric acid, hydroxyvaleric acid, caprolactone, p-dioxanone, trimethylene carbonate, butylene succinate, butylene adipate, monosaccharides, dicarboxylic acid anhydrides, enantiomers thereof, and combinations thereof. The invention is further directed to methods of its use.
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