Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 4, 2007
Patent Application Number
10614295
Date Filed
July 8, 2003
Patent Primary Examiner
Patent abstract
A cleaning apparatus and a cleaning method wherein cleaning and drying can be carried out in the same cleaning apparatus without the risk of reverse contamination of the cleaned object after the drying process. The cleaning apparatus includes a supporting device for supporting an object to be cleaned, and a cleaning cup surrounding the supporting device to prevent splashing of a cleaning liquid. The cleaning apparatus includes a cleaning device for cleaning an inner wall of the cleaning cup with a cleaning liquid.
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