Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 4, 2007
Patent Application Number
10498600
Date Filed
March 17, 2003
Patent Primary Examiner
Patent abstract
A first common electrode is formed on a vibration plate and to be fixed at a predetermined potential. A first piezoelectric layer is laminated on the first common electrode and having a first thickness. A drive electrode is laminated on the first piezoelectric layer, to which a drive signal is supplied externally. A second piezoelectric layer is laminated on the drive electrode and having a second thickness thicker than the first thickness. A second common electrode is laminated on the second piezoelectric layer and to be fixed at the predetermined potential.
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