Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 11, 2007
Patent Application Number
11423553
Date Filed
June 12, 2006
Patent Primary Examiner
Patent abstract
Apparatus for polishing are provided. An apparatus comprises a fluid controller, a polishing apparatus and a fluid interface membrane. The fluid controller is fluidly coupled to the polishing apparatus by way of at least one conduit. The fluid interface membrane is disposed within at least one of the fluid controller, the conduit and the polishing apparatus to separate a first fluid and a second fluid and to transfer pressure from the first fluid to the second fluid.
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