US Patent 7268894 Image measuring method, image measuring system and image measuring program

An image measuring method comprises making no stop of an imaging means relative to a measurement stage at measurement positions (MP1-MP3), and capturing instantaneous images to acquire information required for measurement. A first direction to a measurement position (MP1) to be measured next and a second direction from the measurement position (MP1) to a next measurement position (MP2) form an angle therebetween. If this angle exceeds a certain angle, an overshoot path is formed at a location beyond the measurement position (MP1) in the first direction. The larger the angle formed between the first direction and the second direction, the lower the measurement speed at the measurement position (MP1) is made.