Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chiaki Terasawa0
Takashi Kato0
Date of Patent
September 11, 2007
0Patent Application Number
112716650
Date Filed
November 10, 2005
0Patent Primary Examiner
Patent abstract
A catadioptric projection system for forming an intermediate image of a first object plural times, and images the intermediate image onto a second object includes at least two deflective reflectors, a lens unit arranged in an optical path between the two deflective reflectors, the lens unit having a negative refractive power, and not forming a reciprocating optical system that passes incident light and reflected light.
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