Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Heinz-Georg Vossenberg0
Date of Patent
September 18, 2007
0Patent Application Number
111101030
Date Filed
April 19, 2005
0Patent Primary Examiner
Patent abstract
A micromechanical sensor for measuring at least a first pressure of a first medium, as well as a method for manufacturing such a micromechanical sensor. The micromechanical sensor has at least one substrate having at least two sensor elements, which are preferably made of a semiconductive material. The substrate has at least a first sensor element for measuring an absolute-pressure variable of the first medium and a second sensor element for measuring a relative-pressure variable of the first medium.
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