Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takahiro Matsumoto0
Koichi Sentoku0
Hideki Ina0
Date of Patent
September 18, 2007
0Patent Application Number
111300730
Date Filed
May 17, 2005
0Patent Primary Examiner
Patent abstract
A shape measuring method for measuring a shape of a surface of an object. The method includes a first measuring step for measuring the surface of the object by detecting light from the object, and a second measuring step for measuring the surface of the object by relatively scanning a probe and the object. A scanning speed changes on the basis of the result of the first measurement step.
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