US Patent 7273408 Paired pivot arm

Patent 7273408 was granted and assigned to Applied Materials on September, 2007 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Applied Materials

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7273408

Date of Patent

September 25, 2007

Patent Application Number

11438497

Date Filed

May 22, 2006

Patent Citations Received

‌

US Patent 11705354 Substrate handling systems

Patent Primary Examiner

‌

M. Rachuba

Patent abstract

The present invention relates to an apparatus and method for polishing semiconductor substrates. In one embodiment, two polishing heads are mounted on two independent pivoting arms that share one pivot point. Each of the pivoting arms enable the corresponding polishing head direct access to two polishing stations. The polishing system of the present invention provides flexibility and improves throughput.

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