Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hideo Nakagawa0
Masaru Sasago0
Masayuki Endo0
Yoshihiko Hirai0
Date of Patent
September 25, 2007
Patent Application Number
10399755
Date Filed
October 9, 2001
Patent Primary Examiner
Patent abstract
After a fluid film is formed by supplying a material with fluidity to the surface of a substrate formed with a stepped layer, the fluid film is pressed against the substrate by a pressing member having a planar pressing surface so that the surface of the fluid film is planarized. The fluid film is heated in this state and thereby solidified to form a solidified film having a planar surface.
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