Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 25, 2007
Patent Application Number
10344345
Date Filed
November 23, 1999
Patent Primary Examiner
Patent abstract
A microfabricated plasma generator and a method of generating a plasma, the plasma generator comprising: a substrate chip; a chamber defined by the substrate chip, the chamber including an inlet port through which analyte is in use delivered, an outlet port and a plasma-generation region in which a plasma is in use generated; and first and second electrodes across which a voltage is in use applied to generate a plasma in the plasma-generation region.
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