Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Joannes Theodoor De Smit0
Joeri Lof0
Date of Patent
September 25, 2007
Patent Application Number
11022923
Date Filed
December 28, 2004
Patent Primary Examiner
Patent abstract
A projection system comprises an array of lenses MLA, each lens transmitting a unique part of a patterned beam. Measuring devices measure a distance between the array of lenses MLA and a substrate W. A controller controls an actuator to adjust a position (e.g., height and/or tilt) of the microlens array MLA.
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