US Patent 7274278 Tunable micro electromechanical inductor

Patent 7274278 was granted and assigned to University of South Florida on September, 2007 by the United States Patent and Trademark Office.

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Patent

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Current Assignee

University of South Florida

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7274278

Date of Patent

September 25, 2007

Patent Application Number

11162421

Date Filed

September 9, 2005

Patent Primary Examiner

‌

Dean Takaoka

Patent abstract

The present invention provides a monolithic inductor developed using radio frequency micro electromechanical (RF MEMS) techniques. In a particular embodiment of the present invention, a tunable radio frequency microelectromechanical inductor includes a coplanar waveguide and at least one direct current actuatable contact switch positioned to vary the effective width of a narrow inductive section of the center conductor of the CPW line upon actuation the DC contact switch.

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