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US Patent 7276743 Retaining ring with conductive portion

Patent 7276743 was granted and assigned to Applied Materials on October, 2007 by the United States Patent and Trademark Office.

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Patent abstract

A retaining ring for use with electrochemical mechanical processing is described. The retaining ring has a generally annular body formed with a conductive portion and a non-conductive portion. The non-conductive portion contacts the substrate during polishing. The conductive portion is electrically biased during polishing to reduce the edge effect that tends to occur with conventional electrochemical mechanical processing systems.

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Patent Citations Received
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US Patent 11691244 Multi-toothed, magnetically controlled retaining ring
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US Patent 07276743 Retaining ring with conductive portion US Patent 7276743 Retaining ring with conductive portion

Infobox
Patent Number
0727674300
Patent Number
727674300
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=0727674300
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Infobox
Is a
Patent
Patent
0
Current Assignee
Applied Materials
Applied Materials
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
072767430
Date of Patent
October 2, 2007
0
Patent Application Number
111277900
Date Filed
May 11, 2005
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=072767430
Patent Primary Examiner
‌
David Nhu
0
Edits on 26 Sep, 2022
"Entity importer update"
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Golden AI
edited on 26 Sep, 2022
Infobox
Is a
Patent
Patent
0
Current Assignee
Applied Materials
Applied Materials
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
072767430
Date of Patent
October 2, 2007
0
Patent Application Number
111277900
Date Filed
May 11, 2005
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=072767430
Patent Primary Examiner
‌
David Nhu
0
Edits on 17 Jun, 2022
"Entity importer update"
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Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07276743
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 US Patent 07276743 Retaining ring with conductive portion

Infobox
Is a
Patent
Patent
Current assignee
Applied Materials
Applied Materials
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07276743
Date of patent
October 2, 2007
Patent application number
11127790
Date Filed
May 11, 2005
Patent primary examiner
‌
David Nhu

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