US Patent 7276847 Cathode assembly for indirectly heated cathode ion source
Patent 7276847 was granted and assigned to Varian Semiconductor Equipment Associates on October, 2007 by the United States Patent and Trademark Office.
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A cathode in an indirectly heated cathode ion source is supported by at least one rod or pin. The cathode is preferably in the form of a disk, and the support rod is smaller in diameter than the disk to limit thermal conduction and radiation. In one embodiment, the cathode is supported by a single rod at or near its center. The support rod may be held by a spring-action clamp for simple and reliable clamping and unclamping. The disk shaped cathode and the support rod may be fabricated as a single piece. A filament that emits electrons thermionically may be disposed around the rod in close proximity to the cathode.
US Patent 07276847 Cathode assembly for indirectly heated cathode ion source US Patent 7276847 Cathode assembly for indirectly heated cathode ion source
US Patent 07276847 Cathode assembly for indirectly heated cathode ion source
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