US Patent 7277189 Generation of a library of periodic grating diffraction signals
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Patent Inventor Names
Nickhil Jakatdar0
Xinhui Niu0
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Patent abstract
A method of generating a library of simulated-differentiation signals (simulated signals of a periodic grating includes obtaining a measured-diffraction signal (measured signal). Hypothetical parameters are associated with a hypothetical profile. The hypothetical parameters are varied within a range to generate a set of hypothetical profiles. The range to vary the hypothetical parameters is adjusted based on the measured signal. A set of simulated signals is generated from the set of hypothetical profiles.
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US Patent 07277189 Generation of a library of periodic grating diffraction signals US Patent 7277189 Generation of a library of periodic grating diffraction signals
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Patent Number
07277189
Patent Number
7277189
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US Patent 07277189 Generation of a library of periodic grating diffraction signals
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Patent jurisdiction
Patent number
07277189
Date of patent
October 2, 2007
Patent application number
11189161
Date Filed
July 25, 2005
Patent primary examiner
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