Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shinichi Kitamura0
Date of Patent
October 9, 2007
Patent Application Number
10957413
Date Filed
October 1, 2004
Patent Primary Examiner
Patent abstract
The present invention is intended to solve the problem that the tip of the probe of a scanning probe microscope cannot be conditioned stably due to overload in a contact region. This problem is solved by a scanning probe microscope for scanning the probe and a sample relative to each other. The microscope has a cantilever, a vibration means for vibrating the cantilever, and a vibration signal-switching means for switching a vibration signal applied to the vibration means between at least two different signals. The cantilever has a resilient body that supports the probe.
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