Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mark Alfred Lantz0
Date of Patent
October 9, 2007
0Patent Application Number
113940060
Date Filed
March 30, 2006
0Patent Primary Examiner
Patent abstract
The present invention provides a pressure sensor. The pressure sensor comprises a substrate with several support structures attached to the substrate. The pressure sensor further includes a strut structure integrated with a heating element. The strut structure is engaged with the support structures so as to create an air gap between the heating element and the substrate. The heating element has an electrical resistance proportional to changes in air pressure in the air gap.
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