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US Patent 7278911 Conductive polishing article for electrochemical mechanical polishing

Patent 7278911 was granted and assigned to Applied Materials on October, 2007 by the United States Patent and Trademark Office.

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Patent abstract

Embodiments of a polishing article for polishing a substrate are provided. In one embodiment, the polishing article includes a ring-shaped upper layer having a polishing surface, and a conductive layer coupled to the upper layer and forming a replaceable assembly therewith.

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