Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Valery M. Dubin0
Steven W. Johnston0
Peter Moon0
Michael L. McSwiney0
Date of Patent
October 9, 2007
0Patent Application Number
102845760
Date Filed
October 31, 2002
0Patent Primary Examiner
Patent abstract
Noble metal may be used as a non-oxidizing diffusion barrier to prevent diffusion from copper lines. A diffusion barrier may be formed of a noble metal formed over an adhesion promoting layer or by a noble metal cap over an oxidizable diffusion barrier. The copper lines may also be covered with a noble metal.
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