US Patent 7279845 Plasma processing method and apparatus
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Patent Inventor Names
Koji Yamaguchi0
Toshiji Nishiguchi0
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Patent abstract
A method and apparatus for processing a target substance by using atmospheric-pressure plasma produced by a composite waveform generated by superimposing a high-frequency sine wave and a high-frequency square wave at the same or substantially the same frequency and at the same or substantially the same phase are provided.
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US Patent 07279845 Plasma processing method and apparatus US Patent 7279845 Plasma processing method and apparatus
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Patent Number
072798450
Patent Number
72798450
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Patent Jurisdiction
Patent Number
072798450
Date of Patent
October 9, 2007
0Patent Application Number
110805500
Date Filed
March 16, 2005
0Official Website
Patent Primary Examiner
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US Patent 07279845 Plasma processing method and apparatus
Infobox
Is a
Patent jurisdiction
Patent number
07279845
Date of patent
October 9, 2007
Patent application number
11080550
Date Filed
March 16, 2005
Patent primary examiner
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