Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Dongmin Chen0
Shaoher X Pan0
Shoucheng Zhang0
Xiao Yang0
Date of Patent
October 9, 2007
0Patent Application Number
111474200
Date Filed
June 6, 2005
0Patent Primary Examiner
Patent abstract
A micro-mirror array that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a vertical torsion hinge, and a mirror plate, all being fabricated from a single wafer. The micro-mirror array has a large fill ratio.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
