Is a
Patent attributes
Current Assignee
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Frank Y. Xu0
Nicholas A. Stacey0
Date of Patent
October 16, 2007
0Patent Application Number
109190620
Date Filed
August 16, 2004
0Patent Primary Examiner
Patent abstract
The present invention includes a composition to form a layer on a substrate having uniform etch characteristics. To that end, the composition has a plurality of components, a subset of which has substantially similar rates of evaporation for an interval of time.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.