Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 16, 2007
Patent Application Number
11067491
Date Filed
February 28, 2005
Patent Citations Received
Patent Primary Examiner
Patent abstract
A sensor for use at substrate level in a high numerical aperature lithographic apparatus, the sensor having a transparent plate that covers a sensing element and includes elements that improve coupling of radiation into the sensing element. The elements include Fresnel lenses, holographic optical elements, inverted Winston Cones, spherical lenses and surface roughening.
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