Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 16, 2007
Patent Application Number
11342040
Date Filed
January 27, 2006
Patent Primary Examiner
Patent abstract
An alignment apparatus which moves a object comprises a first structure having a holding member which holds the object, a second structure having a magnet which constitutes a linear motor, the linear motor drives the first and second structure, and a flow passage formed between the holding member and the magnet.
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