Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 16, 2007
Patent Application Number
10931647
Date Filed
August 31, 2004
Patent Primary Examiner
Patent abstract
Measurement systems and methods extend the use of optical navigation to measure displacements smaller than a wavelength of the light used to capture images of an object measured. Nanometer-scale movements can thus be measured, for example, in equipment used for manufacture of integrated circuits or nanometer scale devices.
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