Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 23, 2007
Patent Application Number
11058723
Date Filed
February 15, 2005
Patent Primary Examiner
Patent abstract
The present invention relates to the use of a C1 to C5 alcohol during the cleaning step. With the use of said alcohol, the surface tension of the solution is reduced which allows the application of reduced megasonic power with increased cleaning efficiency.
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