Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 23, 2007
Patent Application Number
11170414
Date Filed
June 28, 2005
Patent Citations Received
Patent Primary Examiner
Patent abstract
An in-situ interferometer includes an image modifying optic that produces light ray bundles. The light ray bundles are projected onto a reticle with a plurality of measurement fiducials encoded onto a face of the reticle. The measurement fiducials are exposed onto a sensing plane and their locations measured. Aberrations in the projection system are determined from the measurements of the exposed reticles.
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