Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hsun-Kai Chan0
Ta-Yu Liu0
Date of Patent
October 30, 2007
Patent Application Number
11148607
Date Filed
June 8, 2005
Patent Primary Examiner
Patent abstract
The invention discloses a developing apparatus and a developing process. Wherein the developing process comprises following steps. First, a developing apparatus and a substrate are provided, wherein the developing apparatus comprises a conveyer and a nozzle. Then, the substrate is conveyed along a first direction by the conveyer, and the nozzle is driven to move along a second direction opposite to the first direction, wherein the nozzle sprays a developer over the substrate as moving. As mentioned above, the non-uniformity of development can be reduced.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
