US Patent 7287920 Semiconductor manufacturing apparatus and method
Patent 7287920 was granted and assigned to Tokyo Electron on October, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 16, 2006
0
Date of Patent
October 30, 2007
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Patent Application Number
11354987
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Patent Inventor Names
Masami Akimoto
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Nobuaki Matsuoka
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Shinichi Hayashi
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Suguru Enokida
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Tsunenaga Nakashima
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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