US Patent 7289198 Process compensation for step and scan lithography
Patent 7289198 was granted and assigned to Intel on October, 2007 by the United States Patent and Trademark Office.
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Patent abstract
A method of process variation compensation in step-and-scan lithography which comprises estimating a magnitude of a process error over a full imaged substrate surface and applying error correction during scan exposure over the full imaged substrate surface is provided in the disclosed embodiments.
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US Patent 07289198 Process compensation for step and scan lithography US Patent 7289198 Process compensation for step and scan lithography
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Patent Number
0728919800
Patent Number
728919800
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Official Website
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
072891980
Date of Patent
October 30, 2007
0Patent Application Number
109896840
Date Filed
November 15, 2004
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
072891980
Date of Patent
October 30, 2007
0Patent Application Number
109896840
Date Filed
November 15, 2004
0Official Website
Patent Primary Examiner
Edits on 17 Jun, 2022
Golden AI
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US Patent 07289198 Process compensation for step and scan lithography
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07289198
Date of patent
October 30, 2007
Patent application number
10989684
Date Filed
November 15, 2004
Patent primary examiner
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