Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Paul A. Tervo0
John L. Dunklee0
Clarence E. Cowan0
Date of Patent
November 6, 2007
0Patent Application Number
115468270
Date Filed
October 11, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
To reduce noise in measurements obtained by probing a device supported on surface of a thermal chuck in a probe station, a conductive member is arranged to intercept current coupling the thermal unit of the chuck to the surface supporting the device. The conductive member is capacitively coupled to the thermal unit but free of direct electrical connection thereto.
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