Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
November 6, 2007
0Patent Application Number
110110590
Date Filed
December 15, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Defects on a wafer (26) can be detected using bright-field and/or dark-field illumination. The radiation incident onto the wafer (26) has, in this context, a substantial influence on the reliability of the measurement results. To improve the reliability of the measurement results, the wafer (26) is illuminated with an illumination device (12), adjustment of the illumination device (12), in particular its brightness and frequency, being accomplished in consideration of read-out stored illumination setpoints. These illumination setpoints are determined by way of a previous reference measurement.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
