Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kenji Yamamoto0
Mikako Takeda0
Seiichiro Ohmoto0
Date of Patent
November 13, 2007
Patent Application Number
10807332
Date Filed
March 24, 2004
Patent Primary Examiner
Patent abstract
A hard film formed of a material containing a (M1-xSix)(C1-dNd) compound, wherein M is at least one of Al and the elements in groups 3A, 4A, 5A and 6A, 0.45≦x≦0.98 and 0≦d≦1, where x, 1-x, d and 1-d are atomic ratios of Si, M, N and C, respectively.
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