Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Peng Liu0
Vivek Singh0
Date of Patent
November 13, 2007
0Patent Application Number
107897030
Date Filed
February 27, 2004
0Patent Primary Examiner
Patent abstract
Systems and techniques to quickly and accurately model a transmitted electromagnetic field through a mask, to design a mask, and to create a library of corrections including edge corrections, edge-to-edge corrections, and corner corrections.
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