Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
William M. Lamanna0
Patricia M. Savu0
Michael J. Parent0
Date of Patent
November 13, 2007
0Patent Application Number
107924560
Date Filed
March 3, 2004
0Patent Primary Examiner
Patent abstract
Described are anionic N-substituted fluorinated sulfonamide surfactants, and use thereof in cleaning and in acid etch solutions. The cleaning and etch solutions are used with a wide variety of substrates, for example, in the cleaning and etching of silicon oxide-containing substrates.
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