Patent attributes
A pressure sensor includes: an airtight case equipped with first and second pressure input orifices provided respectively on opposing first and second wall surfaces; a cylindrical first bellows fixed on the first wall surface at one end and equipped with a shaft hole communicating with the first pressure input orifice; a cylindrical second bellows fixed on the second wall surface at one end; equipped with a shaft hole communicating with the second pressure input orifice and arranged in series with the first bellows; a resonator-adhering pedestal arranged and fixed between other ends of the first and second bellows; a lamellar piezoelectric resonator supported by the resonator-adhering pedestal, and an oscillation circuit electrically connected to an electrode pattern of the piezoelectric resonator. The piezoelectric resonator is fixed on the second wall surface at one end and fixed on the resonator-adhering pedestal at the other end; a piezoelectric reinforcement plate is fixed between the second wall surface and the resonator-adhering pedestal at a position across the second bellows from the piezoelectric resonator. An inner wall of the airtight case is joined to the resonator-adhering pedestal by a resilient reinforcement member.
