US Patent 7297461 Radiation sensitive resin composition
Patent 7297461 was granted and assigned to JSR Corporation on November, 2007 by the United States Patent and Trademark Office.
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Patent abstract
A radiation-sensitive resin composition comprising (A) a resin containing a structural unit of the following formula (I), (B) a resin containing a recurring unit of the following formula (II), and (C) a photoacid generator,
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US Patent 07297461 Radiation sensitive resin composition US Patent 7297461 Radiation sensitive resin composition
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Patent Number
0729746100
Patent Number
729746100
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
072974610
Date of Patent
November 20, 2007
0Patent Application Number
109750520
Date Filed
October 28, 2004
0Official Website
Patent Primary Examiner
Edits on 26 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
072974610
Date of Patent
November 20, 2007
0Patent Application Number
109750520
Date Filed
October 28, 2004
0Official Website
Patent Primary Examiner
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US Patent 07297461 Radiation sensitive resin composition
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07297461
Date of patent
November 20, 2007
Patent application number
10975052
Date Filed
October 28, 2004
Patent primary examiner
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